Microwave Discharge Oxygen Ion Source for Ionospheric Plasma Environment Simulation
نویسندگان
چکیده
منابع مشابه
Bernas ion source discharge simulation.
As the technology and applications continue to grow up, the development of plasma and ion sources with clearly specified characteristic is required. Therefore comprehensive numerical studies at the project stage are the key point for ion implantation source manufacturing (especially for low energy implantation). Recently the most commonly encountered numerical approach is the Monte Carlo partic...
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Metastable oxygen atoms and molecules have received increased interest because of their function in surface modification, bio-decontamination and many other industrial applications, in addition to the role in the upper atmospheric layer chemistry. We review work on production and detection of metastable oxygen and we describe our experiments, including the development of techniques for measurem...
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The Plasma and Ion Source Technology Group at LBNL have developed a microwave ion source. The source consists of a stainless-steel plasma chamber, a permanent-magnet dipole structure and a coaxial microwave feed. Measurements were carried out to characterize the plasma and the ion beam produced in the ion source. These measurements included current density, charge state distribution, gas effici...
متن کاملDevelopment of a microwave ion source for ion implantations.
A microwave ion source is expected to have a long lifetime, as it has fewer consumables. Thus, we are in the process of developing a microwave ion source for ion implantation applications. In this paper, we report on a newly developed plasma chamber and the extracted P(+) beam currents. The volume of the plasma chamber is optimized by varying the length of a boron nitride block installed within...
متن کاملComparison between off-resonance and electron Bernstein waves heating regime in a microwave discharge ion source.
A microwave discharge ion source (MDIS) operating at the Laboratori Nazionali del Sud of INFN, Catania has been used to compare the traditional electron cyclotron resonance (ECR) heating with an innovative mechanisms of plasma ignition based on the electrostatic Bernstein waves (EBW). EBW are obtained via the inner plasma electromagnetic-to-electrostatic wave conversion and they are absorbed by...
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ژورنال
عنوان ژورنال: JOURNAL OF THE JAPAN SOCIETY FOR AERONAUTICAL AND SPACE SCIENCES
سال: 2004
ISSN: 1344-6460
DOI: 10.2322/jjsass.52.528